It is hard to design for beam expander with high power and wide aperture required, because it is shorten length, larger aperture, as well as on axis and off axis aberration must be corrected properly.
高倍率及大孔径扩束器要求筒长短、口径大、轴上和轴外的像差都要很好地校正，所以光学系统的设计是非常困难的。
The design results show that on-axis and off-axis aberrations of the designed laser scanning lens are almost equal, and the image quality achieves the diffraction limit.
像质评价分析结果表明，所设计的镜头像质优良，轴上与轴外质量相当，像质达到衍射极限。
A new design of off-axis five mirrors optics was presented which was used to extreme-ultraviolet lithography. It was very suit for the commercialization at optical quality and free work distance.
本文探讨了一种可应用于极紫外光刻光学系统的离轴五反射镜系统，它在光学质量、自由工作距离方面满足了极紫外光刻商业化的要求。
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