By choosing suitable boundary normalized equation in according to R-function theory, the irregularity of integral kernel in integral equation can be eliminated.

得到的积分方程中的积分核具有奇异性，再根据R -函数理论，可以选择适当的边界规范化方程，消除核的奇异性。

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Secondly, the reflective characteristic of micro mirror is analyzed. And then a normalized equation that governs the static characteristics of the electrostatic driving structure is derived.

其次，分析了光开关微反射镜的反射特性，然后推导了归一化的光开关静电驱动结构力矩平衡特性方程。

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