【Key words】 scanning tunneling microscopy； nano level vibration； tunneling effect； vibration detection； vibration compensation；
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nano-level vibration sensor 纳米级振动传感器
Using this system, it can ensure the measurement of nano level vibration.
这样可以保证在隧道状态下对纳米级振动进行测量。
参考来源 - 基于隧道效应的纳米级振动检测理论与技术的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
Experiments demonstrate that the system has good amplitude-frequency response to the nano level vibration in the tunneling state.
实验表明，实验系统在隧道状态下对纳米级振动有很好的幅频响应。
The main contents in the dissertation are as follows:Analyzing the sensitivity to vibration of STM, putting forward the design of nano level vibration measuring method based on tunneling effect.
本文的主要研究内容是：通过分析STM对振动的敏感性，提出基于隧道效应的纳米级振动测试方法的设计。
With high resolution and sensitivity, the nano-level vibration sensor based on tunneling effect is designed and vibration detection experiments are carried out.
设计了基于隧道效应的纳米级振动传感器，该传感器具有很高的灵敏度和分辨力，并用设计的振动传感器进行了纳米级振动检测试验。
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