A semiconductor dynamic quantity sensor includes a semiconductor substrate that includes a movable electrode, a pair of first fixed electrodes, and a pair of second fixed electrodes.
半导体动态量传感器包括一个半导体基底,上面有可移动电极,一对第一固定电极,一对第二固定电极。
The movable driving electrode film is thinner than the movable contact electrode film.
所述可移动驱动电极膜比所述可移动接触电极膜薄。
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