• 微探尖 - 引用次数：5

  In this paper,the technology of fabricating GaAs pyramidal microtips by selective Liquid Phase Epitaxy is introduced in great details,including mask preparation,photolithography, wet etching and liquid phase epitaxial growth.

  本文详细介绍了选择性液相外延法制备金字塔状GaAs微探尖的工艺流程,包括掩膜的制备、光刻、湿法刻蚀、液相外延等等。

  参考来源 - GaAs金字塔状微探尖的制备与改进

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