Abstract: Lithographic exposure is the key process in the manufacture of integrated circuit, and the performance of exposure system decides the level of microelectronic manufacture technology.
摘要:投影曝光工艺是集成电路制造过程中的关键环节,曝光系统的工艺水平已成为衡量微电子制造技术的重要标志。
Lithographic exposure is the key process in the manufacture of integrated circuit, and the performance of exposure system decides the level of microelectronic manufacture technology.
投影曝光工艺是集成电路制造过程中的关键环节,曝光系统的工艺水平已成为衡量微电子制造技术的重要标志。
It has key courses of microelectronics: solid-state electronic theory, microelectronic devices and principles, integrated circuit design, micro-electronics processing, etc.
目前承担微电子专业方向的主干课程:固态电子论、微电子器件与原理、集成电路设计,微电子工艺等课程。
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