Based on the principle of micro displacement of piezoelectric ceramic, the research on the precise actuator technique is presented, which is used for precise positioning work piece stage.
以压电陶瓷微位移原理为基础，对精密驱动技术在精密定位工件台上的应用作了实验研究。
Its precision, error, sensitivity and stability have greater raising than traditional measurement technique, the full automatic measure of micro-displacement is realized.
与传统测量方法相比，其精度、误差、灵敏度及稳定度都有较大提高，并实现了微位移的全自动测量。
The precision, sensitivity and stability in this system have been improved compared with traditional measurement technique, the full automatic measurement of micro-displacement is realized.
与传统测量方法相比，其精度、灵敏度及稳定性能有较大提高，并实现了微位移的全自动测量。
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