In this dissertation. The theory and key technologies to measure long-range displacement with nanometer resolution by metrology grating is studied.

本文主要研究利用低线数计量光栅实现具有大量程、纳米级分辨率的位移测量理论及其关键技术。

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This paper presents a new non-contact displacement sensor with diffraction grating metrology system based on an improved Foucault focus detection method.

本文介绍了一种新型的基于改进傅科聚焦探测法且自带衍射光栅计量系统的非接触式位移传感器。

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