MEMS measuring technique MEMS测试技术
Several means adopted in MEMS technique by using new element and IF digitized are put forward to improve integration of the receiver.
提出了利用微机电系统（MEMS）技术，采用新的元器件以及数字化中频技术来提高接收机集成度的方法。
The Amplitude mask of LPFGs will bear the advantage of easy to be made, high precision and good agility if fabricated by MEMS technique.
MEMS工艺使长周期光栅振幅掩模版的制作变得简单、灵活、且精度高。
Study on designing of sensor device's structures and whole reasonable fabrication process, which are two key issues of uncooled infrared bolometer that based on MEMS technique.
本论文对实现基于MEMS工艺技术的非制冷型红外测辐射热计的两个主要关键内容进行了深入研究，即敏感器件结构的设计和整个制造工艺流程的合理设计。
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