For there is a close relationship between structures and properties of material, material structure testing and characterization become an important component of material science.
材料的组织与材料性能密切相关，对于组织的检测与表征是材料科学的重要组成部分。
Testing technique based on MEMS mainly includes testing technique of material characterization, dynamic characterization and reliability characterization.
基于MEMS的测试技术主要有MEMS材料特性测试技术、MEMS动态特性测试技术、MEMS可靠性测试技术等方面。
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