Last, a technique known as anisotropic ion beam milling (IBM) is used to etch through the mask to make an array of holes, creating the nanoporous metal.

最后，采用各项异性的离子束(IBM)加工技术可以通过掩膜来蚀刻孔阵，以制成纳米多孔金属材料。

youdao

Photoresist grating was fabricated by holography, and it was used in the mask of ion etching.

采用全息法制备了光刻胶光栅，并用该光栅掩膜离子蚀刻。

youdao