Conventional Interferometric Lithography 干涉微影 ; 传统干涉微影
Laser interferometric lithography 激光干涉光刻
interferometric lithography il 干涉光刻
Imaging interferometric lithography 成像干涉光刻
The paper only involves the primary research of interferometric lithography. In order to enable the potential capability of interferometric lithography technology being applied in much more fields, the further deeper research is necessary.
本文涉及的研究仅仅是干涉光刻研究的起步，为使干涉光刻技术的潜在能力在众多的领域中得到实际应用，更进一步的深入研究是十分必要的。
参考来源 - 激光干涉光刻技术·2,447,543篇论文数据，部分数据来源于NoteExpress
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