The garlic seed immersion fluid is natural product, the features of which comprise small skin irritation, low price, economy, practicality.

本发明为天然物品，对皮肤刺激性小，且价格低，经济实用。

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An apparatus and method for maintaining immersion fluid (212) in the gap adjacent the projection lens (16) during the exchange of a work piece (208) in a lithography machine (10) is disclosed.

本发明公开一种设备和方法，用于在更换平板印刷机(10)中工件(208)期间，将浸没流体(212)保持在邻接投射透镜(16)的间隙中。

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An immersion fluid containment system (214) is provided to maintain the immersion liquid (212) in the gap during removal of the first work piece (208) and replacement with the second work piece.

配置浸没流体约束系统(214)，以便在取下第一工件(208)，并用第二工件代替时，可以将浸没流体(212)保持在该间隙中。

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