laser holographic lithography 胶体粒子
holographic lithography technology 激光全息技术
The methods for improving interference pattern contrast and period stability are also studied. The principle, theory, realizing methods for holographic lithography as well as the pattern transfer mechanism among the traditional photomask-hologram mask-resist have been deeply investigated.
对全息光刻的原理、理论、实现方法及传统光掩模—全息掩模—抗蚀剂图形传递机理进行了深入的研究，设计和建立了采用直角棱镜和折射率匹配液的全内反射波前共轭全息光刻实验系统，进行了实验研究。
参考来源 - 激光干涉光刻技术No.4: Use holographic lithography to create grating and 2D holographic crystal templates, record and process the data. Analyze the factors which affect the quality of the holographic crystal templates.
4．利用激光全息法依次制作不同周期的光栅和二维正三角形光子晶体模板，记录处理实验数据，根据实验结果分析影响光子晶体模板质量的因素。
参考来源 - 基于全息光刻及软刻蚀技术制备二维光子晶体模板·2,447,543篇论文数据，部分数据来源于NoteExpress
Microfabrication of periodic structures by holographic lithography technology combining with visible laser-induce photopolymerization is developed in this paper.
本文报道用激光全息技术结合可见光光聚合制作周期结构的方法和物理机制；
We fabricate desired structured surfaces by holographic lithography, plasma etching and Teflon coating. The performance is evaluated by measuring the reflectance spectrum and contact angle.
实验上，我们采用全像微影术、电浆蚀刻以及旋镀铁氟龙的方式来制作试片，并量测该试片的反射频谱和接触角。
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