... 算法图形发生器 ALPG 硬件图形发生器 hardware pattern generator 模式发生器图形发生器 pattern generator ...
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An imaging system of pattern generator was designed to correct linear distortion of scanning field of ane-beam lithography system, which was composed of both hardware and software.
为实现电子束曝光机扫描场的线性畸变校正，设计了图形发生器的成像系统，该系统包括硬件和软件两部分。
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