The application of WO_3 sensing-film and gas sensing mechanism are reviewed. Different dopings have different effects on gas sensitivity.
介绍了气敏性方面的应用和机理,说明了不同掺杂对气敏的影响;
Moreover, the sensing mechanism of the Pirani sensor and the micro-scale thermal conduction of the gas in the silicon-based Pirani sensor have also been investigated in this work.
此外,本文也研究了传感器的敏感机理和硅微皮拉尼传感器中气体导热的微尺度效应。
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