The dependence of etching rate and profile on the vacuum pressure, RF pow-er, gas composition and flow rate, and electrode temperature is analyzed.
分析了真空压力、射频功率、气体组合及其流量和电极温度对刻蚀速率、刻蚀剖面的影响；
To study RH vacuum refining process, a new mathematical model of circulation flow rate to describe the circulation flow of molten steel in RH vacuum refining degasser was developed.
本文以RH真空精炼装置为研究对象，建立了描述RH真空精炼装置内钢液循环流动环流量的数学模型。
The vapor flow rate is determined by both the temperature of the vaporizer and the setting of the conductance of the mechanical throttle valve located between the vaporizer and the vacuum chamber.
所述蒸气流速取决于所述气化器的温度及位于所述气化器与所述真空室之间的机械节流阀的流导的设定值二者。
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