... 微细图形 fine patterning 微相分离共聚物 microphase-separated copolymer 微型试样 mini-tensile-specimen ...
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fine-patterning 微细图形
From such a kind of photosensitive PLZT gel films, the fine patterning has been fabricated.
利用这种感光性凝胶薄膜可以制备出PLZT的微细图形。
参考来源 - 锆钛酸铅镧铁电薄膜的制备及微细加工·2,447,543篇论文数据，部分数据来源于NoteExpress
To make a TFT-LCD panel which has higher performance, fine patterning process of photolithography is needed. Making smaller via pattern is one of main issue for fine patter - ning.
为了获得更高性能的TFT - LCD面板，在光刻时保证精细的图形成像十分重要，其中，如何制作出尺寸更小的通孔图形是主要的问题之一。
Combined with characteristics of functional films, a photosensitive sol-gel technique, in this paper, was examined, during which the fine-patterning process of the films was taken into consideration.
本研究结合功能薄膜的特点，研究了感光溶胶-凝胶技术，在薄膜的制备过程中就考虑到薄膜的微细加工。
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