Flat planetary holder is used in big area optical film for outdoor lighting and film thickness uniformity is counted in this paper. The result of uniformity is gained after testing.
采用平面公自转行星夹具镀制户外照明用大面积光学薄膜，计算了光学薄膜膜厚的均匀性，经测试得到均匀性的结果。
Finally, the key design parameters of coating system was obtained, this system can meet ITRS requirements on uniformity of film thickness.
最后给出了镀膜系统的关键设计参数，此镀膜系统能够满足ITRS关于膜厚均匀性的要求。
The preparation parameters were investigated by evaluation of the film coating thickness and uniformity.
以薄膜包衣厚度和均匀性为指标，考察包衣工艺参数。
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