... fiducial mark 基准标记 Field batch weight 工地盘重 Field control 工地控制 ...
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MEMS (micro electro mechanical system) is a new field which has a lot of advantages: small volume, light weight, low energy consumption, fast response, big batch and low cost etc.
微型机电系统是一个新兴的技术领域,其主要优点是体积小、重量轻、能耗少、响应快、大批量、成本低等,有广泛的应用前景。
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