In view oi the problems existing in the silicon micro pressure sensors, this paper proposes the chemical etching techniques and the selective etching processes to control diaphragm thickness.
并针对硅微压传感元件研制中存在的问题,提出采用化学腐蚀技术,选择性腐蚀工艺控制膜厚。
Etching. Use chemical principle, the surface of the metal part destroyed to form patterns, all kinds of metal etching can do color paint or stain treatment.
蚀刻。利用化学原理,将金属表面局部予以破坏构成图案,各类金属蚀刻后可再做上色烤漆或是染色处理。
Dow etching a powerless etching technique for letter-press plates invented by Dow Chemical Corporation.
陶氏腐法陶氏化学公司发明的一种无粉腐技巧。用来制造活版印版。
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