Double sided polishing process has become a main machining method for silicon wafer finishing process, but it is difficult to get ultra-smooth surface with the very stringent machining conditions.
双面抛光已成为硅晶片的主要后续加工方法，但由于需要严格的加工条件，很难获得理想的超光滑表面。
Machining KDP crystal with an ultra-smooth surface is a key subject in the field of modern ultra-precision machining.
加工超光滑表面的KDP晶体是现代超精密加工技术领域的重点研究课题。
Nano-particle colloid jet polishing is a new kind of ultra-precision machining technology which has important research and application value in fabricating ultra smooth surface.
针对激光陀螺反射镜常用材料微晶玻璃的加工技术，介绍了一种较为成熟的超光滑表面加工方法—定偏心浸液式抛光。
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