thin-film semiconductor device 薄膜半导体器件
A method of severing a thin film semiconductor device.
在切断一薄膜半导体器件的方法。
Therefore, a semiconductor device including a thin film integrated circuit can be manufactured easily.
因此,可以容易地制造包含薄膜集成电路的半导体器件。
The present invention provides a thin film transistor in which a substantial length of a channel is shortened to miniaturize a semiconductor device and a manufacturing method thereof.
本发明提供一种薄膜晶体管及其制造方法,其中该晶体管的沟道的 基本长度被缩短以微型化半导体装置。
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