silicon direct bonding sdb
silicon direct bonding sdb
硅直接键合
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Successful Silicon to silicon direct bonding(SDB)mainly depend on the hydrophilicity treatment of silicon surface. Micro mechanism of hydrophilicity has been analyzed in the paper for the first time.
硅片直接键合(SDB) 技术的关键在于硅片表面的亲水处理, 本文分析了亲水处理之微观机理。
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