rutherford backscattering spectrometry rbs
rutherford backscattering spectrometry rbs
卢瑟福后向散射光谱法
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Rutherford backscattering spectrometry (RBS) demonstrates that the concentration of Fe or N atoms varies gradually from the substrate to the surface through the whole thickness of the films.
卢瑟福背散射分析结果表明,铁、氮两种原子的密度沿膜厚度方向呈梯度变化。
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