rf-mems开关 rf-mems switches
...机器件和电路的研究进展 关键词： RF MEMS 开关；释放时间；开关速度；梁振动；偏置电压 [gap=1369]Key words:RF MEMS switch; release time; speed of switch; beam vibration; bias voltage ..
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RFMEMS开关 RF MEMS switches
电容式RFMEMS开关 capacitive RF MEMS switch
并联接触式mems开关 contact shunt rf mems switch
射频微机械开关 radio frequency rf mems switch
射频MEMS开关 RF MEMS switch
In this paper, we introduce some basic conceptions of RF MEMS switch such as the switch parameters, classification, typical fabrication process and design considerations.
本文着重介绍了RF MEMS开关的基本参数、分类以及典型制造工艺和设计时考虑因素等一些基本的概念。
As one of the most important MEMS devices, RF MEMS switches have been applied in front-end circuits of some microwave systems, antenna and phase shift architectures.
射频MEMS开关是重要的射频MEMS器件，一些RF MEMS开关已经应用于部分微波系统的前端电路、数字电容器组和移相网络。
A novel capacitive switches structure for the distributed RF MEMS phase shifters is presented based on the analysis of the operation principle.
通过分析MEMS电容开关的工作原理，设计出一种适合分布式射频MEMS移相器电路的新型电容开关。
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