Second, optical broadband monitoring is combined with additional quartz crystal sensors to realize a hybrid process control for improving layer thickness accuracy.

第二，光学宽带监测系统与石英晶体传感器相结合，实现混合工艺控制技术，提高薄膜厚度的精度控制。

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A good result is obtained in measuring Quartz Crystal plane angle when the method is used in automatic measure& control system of X-ray diffraction goniometer.

的自动测控系统，在对人造石英单晶切片的晶面角进行测量时，得到比较令人满意的结果。

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