However, for a wide trench, the width of etched profile will increase with the increase of its depth since the deformation of boundary layer in plasma.

然而，对一个宽槽来说，由于等离子区内边界层的变形，其蚀刻宽度会随着蚀刻深度的增加而增加。

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The boundary layer flow control using dielectric barrier surface discharge plasma is simulated using Poisson's equation, drift-diffusion model and N-S equations.

使用泊松方程、漂移扩散模型和N—S方程对介质阻隔面放电等离子体控制边界层流动进行了一体化数值模拟。

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