It includes: Silicon surface treatment before gate oxidation; nitrogen content in the gate oxide; fluorine content in the gate oxide; the prevention and cure of plasma induced damage.
其中包括:栅极氧化层生长之前的硅表面,栅极氧化层中氮的含量,栅极氧化层中氟的含量,和电浆损伤的防治。
参考来源 - 0.13微米逻辑电路负偏压温度不稳定性的改善·2,447,543篇论文数据，部分数据来源于NoteExpress
The origin of these traps might be due to irradiation damage induced by plasma during insulating layer growth process.
这些陷阱可能是在不同生长条件的介质膜淀积过程中等离子体引进的有关辐照损伤。
The methods reduce or prevent plasma-induced charge damage to the substrates from the deposition of the amorphous carbon films.
这些方法减少或防止等离子体感应电荷由于无定形碳薄膜的沉积而损坏衬底。
It is also an important kind of optical elements for high-power lasers. Its performances have effects on anti-damage of laser. Therefore, the research on laser induced K9 glass plasma is essential.
K9玻璃是常用的光学材料，也是高功率激光器重要的光学元件，其性能的好坏直接关系到光学材料和激光器的抗激光损伤能力。
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