dry film photoresist 干膜抗蚀剂 ; 干膜光阻剂 ; 干膜
aqueous dry film photoresist 水溶性光敏抗蚀干膜
thick film photoresist 厚层光刻胶
dry-film photoresist 干膜光阻
solvent dry film photoresist 溶剂型光敏抗蚀干膜
acrylic acid dry film photoresist 丙烯酸光致抗蚀干膜
The effects of the photoresist film overlays on the propagation of modes in glass planar optical waveguides by silver-ion exchange are measured.
测量并归纳了负胶介质薄层对银离子交换玻璃平面波导传播特性影响的实验趋势。
Uniformity of the photoresist film, adhesiveness between underlay and glue film, exposal and develop condition of high thickness difference are all solved in the thesis.
在厚胶光刻工艺中重点解决了胶膜厚度的均匀性、胶膜与衬底的粘附性、大厚度差胶层的曝光、显影条件等的优化问题。
Photoresist coating preparation and baking; Thin film preparation.
光刻胶的旋涂与烘烤,薄膜材料制备。
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