...； 光路设计 [gap=1539]Keywords： semiconductor chip; QFP chip; threedimensional exterior inspection; optical path design ...
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The design of common optical path structure improves the resistance to environment vibrations and temperature turbulence.
在文中分析了多波长干涉术用于小尺寸测量的基本原理，提出了共光路的设计结构。
The optical design method of the corrector is described in detail, and the design results and experimental light path are given.
详细讨论了补偿器的光学设计方法，给出了设计结果和实际的实验光路，分析了低温光学检测中的一些问题。
Compared with the system of tilted light path, its characteristics were studied. The design parameter of the optical system were given.
同时，进行了结构优选，对空间光路的实现方式作了比较研究，给出了光学系统的设计参数。
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