This system employed optical flow technology and microscopic interferometry combining with stroboscopic illumination to realize the measurement of in-plane and out-of-plane motions of MEMS devices.
系统分别采用光流技术和显微干涉技术，结合频闪照明的方法，对MEMS器件的面内和离面运动特性进行了测量。
Optical heterodyne interferometry together with reflective ellipsometry, a fast measurement technology with high anti-interference performance was applied to nanometer film.
结合激光外差干涉术和反射式椭偏测量技术，设计了一种抗干扰能力强，快速、高精度测量纳米厚度薄膜光学参数的方法。
In this article, the working principle of faint-optical signal detection for the non-contact measurement of IOP based on laser interferometry is introduced in detail.
文中详细介绍激光干涉式非接触眼压测量的弱光检测工作原理。
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