Glow Discharge-Optical Emission Spectrum 熟悉辉光放电原子发射光谱
optical emission spectrum detection 光发射谱检测
time-resolved optical emission spectrum 时间分辨的荧光光谱
The discharge frequency is 30-40kHz; voltage is 6-12kV; power is 2.6-4.0W. The relation between the optical emission spectrum and the deposition mechanism were discussed and the electron temperature was calculated.
整个实验中，介质阻挡放电频率在30-40kHZ范围，电压值在6-12kV范围，放电功率值在2.6-4.0W范围。 通过介质阻挡放电发射光谱与放电条件的关系，并对电子温度的加以测量计算，从机理上分析了放电条件和多孔硅基薄膜的沉积过程的关系。
参考来源 - 常压等离子化学气相沉积制备纳米多孔硅基薄膜的过程和特性研究·2,447,543篇论文数据，部分数据来源于NoteExpress
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