A composite pump was developed which is composed of a non evaporable getter pump and a sputtering ion pump.
研制了一种由非蒸散型消气剂泵与冷阴极溅射离子泵组成的复合泵。
Zirconium-aluminium getter pump is a new type of vacuum installation, in which the non-evaporable getter material is used to absorb the active gases.
锆铝吸气泵是利用非蒸散型吸气剂吸附活性气体的一种新型真空设备。
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