In this study, the microwave plasma device is designed to excite and maintain stable plasma on atmospheric press.
本研究设计了一套微波等离子体反应器，在大气压下激发并维持稳定的等离子体。
In recent years, experiments show that in the plasma loaded high power microwave device may obtain much higher interaction efficiency and output power than the ones absence of plasma.
近年来实验研究发现，等离子体加载高功率微波器件后，器件的输出功率和互作用效率得到显著的提高。
A microwave plasma processing device and a gas supply member capable of forming a uniform thin film on a substrate to be processed.
本发明提供能够在处理基体上形成均匀的薄膜的微波等离子体处理装置和气体供给构件。
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