micro piezoresistive pressure sensor
micro piezoresistive pressure sensor
微型压阻式压力传感器
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Based on the piezoresistive effect, large or small deflection theory, thin film's stress theory and other mechanics or electricity knowledge, a piezoresistive micro pressure sensor is designed.
利用压阻效应、大(小)挠度理论、膜的应力形变等力学、电学知识设计了一种压阻式微压力传感器。
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