MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
A novel micromachining torsion beam optical switch micro- actuator driven by electrostatic force was designed and simulated by means of Finite Element Method (FEM).
报导了一种新型静电驱动扭转梁大位移微机械光开关微动作器的模拟、设计和制作。
A MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
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