Abstract: in order to accurately measure the pulse equivalent and return difference of stepping motor, a laser micro-displacement measurement system is proposed based on thin film interference.

摘要：为了精确测量步进电机的脉冲当量和回程差，提出了一种基于薄膜干涉原理的激光微位移测量系统。

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Its precision, error, sensitivity and stability have greater raising than traditional measurement technique, the full automatic measure of micro-displacement is realized.

与传统测量方法相比，其精度、误差、灵敏度及稳定度都有较大提高，并实现了微位移的全自动测量。

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