Phase transition, enhanced diffusion and Y-Al alloy formation are studied using Y implantation with high current extracted from metal vapor vacuum arc (MEVVA) ion source.
利用金属蒸汽真空弧（MEVVA）源所产生的强束流离子注入铝研究了相变、增强扩散和钇铝合金的形成条件。
A multi-cathode metal vapor vacuum arc (WEVVA) ion source has been designed. It contains an array of 18 cathodes, any of which can be switched into operation rapidly while under vacuum.
设计了一台多阴极的金属蒸气真空弧离子源，它有18个阴极，任一阴极都能在真空状态下被迅速接入电路工作。
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