mechanical-thermal noise 机械热噪声
The noise of capacitive micro accelerometer include mechanical thermal noise and electrical thermal noise;
电容式微加速度计的噪声包括机械热噪声和电热噪声；
Based on the study of frequency and damping, the effects of mechanical characteristic on thermal vibration noise and m.
从器件的频率和阻尼特性出发，研究了器件的机械特性对热振动噪声和机械稳定性能的影响。
A modified model of thermal-mechanical noise is developed to make it adaptable to the micromechanical cantilever in high frequency or low temperature.
本文采用能量统计分布方法研究微机械悬臂梁的噪声模型，对热机械噪声理论模型进行了拓展和修正，使之适用于低温和高频条件。
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