A new method which can efficiently and accurately calculate the mean and standard deviation of a dependent random variable is proposed.

对于从属随机变量统计特征的确定，本文介绍了一种精确高效的确定其均值和标准差的方法。

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Compared with the conventional PID masterslave control method, the move mean difference is reduced by 18.2% and the move standard deviation is reduced by 61.5%, and the exposure effect can be ensured.

相对于传统PID主从同步控制方法，同步偏差的移动平均差减小18.2%，移动标准差减小61.5%，可以保证光刻机的曝光效果。

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By using the sample mean range( R )instead of standard deviation of the sample( S )in"S " method, the"R " method is obtained in this paper.

在“S”法的基础上，利用样本平均极差R代替“S”法中的样本标准差S ，从而得到了“R”法，并且给出了相应的样本大小，及各种情况下的接收标准。

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