The principle of wide-band scanning was analyzed, the linear beam pattern for laser wide-band was proposed, its transfer heat model was presented to calculate the temperature distributions.
分析了扫描原理，提出了线光斑宽带方案及传热模型，并计算了其温度场。
An imaging system of pattern generator was designed to correct linear distortion of scanning field of ane-beam lithography system, which was composed of both hardware and software.
为实现电子束曝光机扫描场的线性畸变校正，设计了图形发生器的成像系统，该系统包括硬件和软件两部分。
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