The principle, structure, measurement limit and analyze of uncertainty of the constant pressure gas flowmeter, which was the key component of gas flow standard apparatus, were considered emphatically.
着重考虑了作为气体微流量标准装置核心的恒压式气体微流量计的原理、结构、下限因素和不确定度等基本问题。
It integrated temperature and pressure sensor with vortex sensor, and it realized the accurate measurement of mass flow through the compensation of gas density.
它将温度、压力和流量传感器融为一体，通过对气体密度进行补偿，实现了精确的质量流量测量。
This paper reviews the work principle of the reactor for deposition temperature, pressure and gas flow control, and the measurement theory of the measurement devices.
其中着重描述了反应腔对反应温度，反应压力和气体流量的控制方法，以及测量设备对淀积薄膜性能的测量原理。
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