In this paper, a probe of vacuum microbalance to monitor and measure for high accuracy of film thickness is introduced, thermostatic probe of the semiconductor refrigeration device.
本文研制了一种用于高精度膜厚监测的真空微量天平探头：半导体致冷器件恒温探头。
The particular requirement on substrate materials selecting, thin film structure design and monitor and control of thin film thickness has been discussed.
讨论了在基底材料选择、膜系设计以及膜厚监控等方面要求的特殊性，并给出了一些滤光片设计和监控的要求。
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