The structure and morphology ofthe coating film are studied by use of SEM andpolarized microscope.
用扫描电子显微镜及偏光显微镜观察涂膜的结构及形态。
The results show that the film, greatly different from conventional oxide films in composition, morphology and structure, is a novel aluminum oxide film.
结果表明，该膜层的成分、形貌及结构与常规氧化膜有很大的区别，是一种新型铝氧化膜。
The effects of the flow rate of oxygen and pulse bias voltage on the structure, deposition rate and the surface morphology of thin film were studied.
研究了氧流量和脉冲偏压对薄膜相结构、沉积速率、表面形貌、薄膜硬度的影响。
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