cubic boron nitride thin films 立方氮化硼薄膜
The preparation and properties study of cubic boron nitride thin films are attractive and also very difficult to international scientific wold for recent years.
近几年来，立方氮化硼薄膜的制备和性质研究一直是国际上的研究热点之一，同时又是难点之一。
High quality cubic boron nitride (c BN) films were synthesized in lab built magnetically enhanced active reaction evaporation system with pulsed DC bias.
采用自行研制的磁增强活性反应离子镀系统，在脉冲偏压条件下成功地合成了高品质立方氮化硼(c BN)薄膜。
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