The results show that the signal processing method can judge the endpoint of the Cu CMP process.
试验结果表明，该信号处理方法可以判断出铜CMP过程的终点。
Applying the signal processing method, the endpoint detection experiments of the Cu CMP process were carried out.
应用该信号处理方法，进行了铜CMP过程的终点检测试验。
We have to face some Cu line issues after we use Cu to replace AL, such as the reliability with Cu and low K dielectric, and post-CMP (Chemical Mechanical Polishing) Cu line voids defect.
在引入电镀铜工艺的同时我们也不得不面对一些铜线工艺所特有的缺陷，如铜线和低K值介电质可靠性问题，以及电镀铜后产生的孔洞缺陷等问题。
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