首件确认是产品的标准及依据。是残次品的判定点。例如:贵厂如不实行首件确认,那么批量制作的产品可能与客户的要求产生细微差异。
在批量之前,是否对外层显影或AOI进行首件确认?此制程是否校准上下对准度?
Are first articles processed through Outerlayer Develop & AOI prior to exposing the remainder of the lot? Is the front to back verified during this process?
在批量蚀刻前是否进行首件与确认蚀刻机设备与线径?
Is a first article run prior to etching the lot to confirm etcher Settings and linewidths?
是否在批量显影前做首件以确认显影设备与线径?
Is a first article run prior to developing the lot to confirm developer Settings and linewidths?
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