结果表明，激光能量对非晶薄膜的晶化和纳米晶粒尺寸有重要影响。
The results indicate that the energy of the annealed laser have important effect on the crystallization of the films and the size of nanoparticles.
载能粒子对非晶薄膜的作用，产生氮离子注入效应，使表层的含氮量增加。
Because of the effect of energy particles on the amorphous films, ion implantation action was produced and nitrogen content in the surface was increased.
并且研究了非晶碳薄膜的场发射特性，计算了薄膜的功函数、实际发射面积和发射点密度。
The field emission properties were studied, and the work function, actual emission area and density of emission spot were calculated.
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