...；静电-结构耦合；耦合条件；边界条件；有限元 [gap=917]Key Words: Electrostatic harmonic;Electrostatic-structural coupling;Coupling conditions;Boundary conditions;Finite element method ..
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为了提高微机电系统中静电-结构耦合数值计算速度，提出了一种新的针对微结构小变形的静电-结构耦合高效率数值计算方法。
In order to improve the efficiency for coupled electromechanical analysis of MEMS system, a new efficient numerical approach for electrostatic MEMS with small deformations is presented.
针对电容式微型压力传感器，专门考虑膜片的空间连续行为以及结构、静电力的耦合作用，建立了包含接口电路在内的系统模型，据此进行了动态行为仿真。
Using this method, the behavior equation of a capacitive micro pressure sensor is represented, then its reusable parameterized schematic-drive model is established coded by HDL (MAST).
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